The X ray fluorescence spectrometer is mainly composed of excitation, dispersion, detection, recording and data processing. The function of the excitation unit is to produce primary X rays. It is composed of a high voltage generator and a X light tube. The latter has a large power, and the water and oil are cooled simultaneously. The function of the dispersion unit is to separate the desired wavelength of the X ray. It consists of a sample room, a slit, a goniometer, an analytical crystal, and so on. The crystal and detector can be rotated by a goniometer at a speed of 1 to 2. The X rays of different wavelengths can be measured at different locations in Prague corner to make qualitative analysis of elements. The detector is the role of the X ray photon energy into electrical energy, used a Geiger counter, proportional counter, scintillation counter and semiconductor detector. The recording unit is composed of an amplifier, a pulse amplitude analyzer, and a display section. You can directly enter the computer through the pulse signal analysis of scaler, on-line processing and the content of the measured elements.